There are still some problems to work out, such as cutting defect rates, but directed self-assembly has the potential to reduce the total number of masks. The upcoming 7nm process node presents tough ...

Through microphase separation, block copolymers (BCPs) can self-assemble into highly uniform, chemically distinct, periodic domains with dimensions and periods at scales of 3–200 nm 1,2 that are ...

(Nanowerk News) Imec and Tokyo Electron (TEL) announce that they will accelerate their Directed Self-Assembly (DSA) activities at imec’s recent 300 mm fab-compatible DSA process line. Over the past ...

At last year’s SPIE Advanced Lithography conference, Christopher Bencher, a member of the technical staff at Applied Materials, said the buzz surrounding directed self-assembly (DSA) technology ...

The Digital Brief is EURACTIV's weekly tech newsletter. Welcome to EURACTIV’s Digital Brief, your weekly update on all things digital in the EU. You can subscribe to the newsletter here. “The EU Chips ...